ALD Nanostructures Laboratory (ANSLab)

Our group’s primary experimental facility is the ALD Nanostructures Laboratory, an integrated facility for synthesis of nanostructures, characterization, and testing that exploits real-time and in-situ characterization while maintaining samples in ultraclean environments.  Atomic- (ALD) and molecular- (MLD) processes are featured together with spectroscopic ellipsometry and downstream mass spectrometry to characterize growth in real-time and in-situ, coupled with a variety of surface and thin film techniques subsequent to ALD/MLD growth. Ultraclean transfer environments include both ultrahigh vacuum (UHV) chambers and glove box ambients.  Metal evaporation, masking, and ion beam etching are also incorporated, notably including alkali and alkaline earth metals (Li, Na, Mg, etc.) relevant to electrochemical energy storage.

Maryland NanoCenter

We regularly employ the facilities of the Maryland NanoCenter as well.  The FabLab provides comprehensive capability for deposition, etching, and lithographic patterning. The AIMLab offers high resolution microscopy including TEM, SEM, analytical counterparts EDS and EELS, and sample modification and analysis by FIB/SEM and ToF-SIMS. Click here to watch the Tour of the Fablab.