Saft Batteries, $600,000., “Enabling Li Metal, High Voltage, All-Solid-State Batteries via Optimization of Solid Polymer Electrolyte Properties and Surface Engineering”, co-PI’s Gary Rubloff, Peter Kofinas, Angelique Jarry. 9/18/18- 9/17/21.

PolyPlus Corporation, $5560., 9/1/18, “ANSLab atomic layer deposition”, PI Gary Rubloff, co-PI ChuanFu Lin.

Maryland Technology Development Corporation (TEDCO), Maryland Innovation Initiative (MII), $115,000., 8/13/18-5/13/19, “Staggered Electrode Multi-battery for Emerging Onboard Power Applications”, PI Gary Rubloff, co-PI’s Keith Gregorczyk, Angelique Jarry, David M. Stewart.

GS Yuasa, $10,000., 8/15/18, “ANSLab atomic layer deposition”, PI Gary Rubloff, co-PI ChuanFu Lin.

Saft Batteries, Inc., “Research in Advanced Batteries”, $85,000., 5/1/2018, PI Gary Rubloff.

Dept. of Energy Office of Science, Materials Chemistry Program, DE-SC0017620,  “Molecular Design and Vapor Phase Synthesis of Hybrid Ion-Conducting Materials Based on Crown Ethers”, $330,000., 5/1/17-10/31/18, PI Gary Rubloff, co-PI’s S.B. Lee and K. Gregorczyk.

ARPA-E, DEAR0000726, “Highly Conductive, Robust, Corrosion-Resistant Nanocarbon Current Collectors for Aqueous Batteries”, $500,000., 4/14/16-4/13/17, PI Liangbing Hu, co-PI Gary Rubloff.

Johns Hopkins Applied Physics Lab, 130936, “FlexiBat: Flexible solid-state batteries for wearable applications”, $50,000., 10/2/15-10/31/16, PI Keith Gregorczyk, co-PIs Gary Rubloff and Malachi Noked.

Dept. of Energy Office of Science, Energy Frontier Research Center (EFRC), DESC0001160, “Nanostructures for Electrical Energy Storage”, $27,200,000, 8/1/09-7/31/20, PI G. W. Rubloff, co-PI S. B. Lee.

National Science Foundation, CBET-1264509, “An integrated approach, using biofabrication and chemical synthesis, to study cell signaling”, $400,000., 8/1/13-7/31/16, PI Herman O. Sintim, co-PI’s Yi Cheng, Gary W. Rubloff, William E. Bentley.

National Science Foundation, Nanomanufacturing program, CMMI-1300361, “Stitching and Healing Graphene Flakes by Atomic-Layer-Deposition for Roll-to-Roll Printing of Transparent Conducting Electrodes, $437,651., 8/1/13-7/31/16, PI Liangbing Hu, co-PI Gary Rubloff.

Robert W. Deutsch Foundation, “Controlling Biology at the Nanoscale: Next-Generation BioChips for Drug Discovery”, $1,115,384. (renewal), 1/1/11-12/31/14, PI’s G. W. Rubloff, W. E. Bentley, R. Ghodssi, and G. F. Payne.

National Science Foundation SCIART program, DMR-1041809, “Protection of Silver Objects from Corrosion using Atomic Layer Deposited Barrier Coatings”, $335,175., 8/1/10-8/1/14, PI R. Phaneuf, co-PI G. W. Rubloff.

National Institute of Standards and Technology, “Ultrafast Dynamics for Next-Generation Nanotechnology”, $1,000,000, FY09, PI Gary W. Rubloff.

National Science Foundation, Emerging Frontiers in Research and Innovation (EFRI), “Biofunctionalized Devices – On Chip Signaling and “rewiring” Bacterial Cell-Cell Communication”, $1,968,984, 10/1/07-9/30/11, NSF-SC03524414, PI’s G. W. Rubloff, W. E. Bentley, R. Ghodssi, and G. F. Payne.

Robert W. Deutsch Foundation, “Controlling Biology at the Nanoscale: Next-Generation BioChips for Drug Discovery”, $1,050,050., 8/31/06-8/30/10, PI’s G. W. Rubloff, W. E. Bentley, R. Ghodssi, and G. F. Payne.

NSF MRSEC seed, “Materials Research for Template-Directed Nanostructure Assembly”, G.W. Rubloff and S. B. Lee, $78,750, 9/1/07-8/31/09, PI’s G. W. Rubloff and S. B. Lee.

IARPA/ARO, “Conventional and ALD Dielectric Film Studies for Improved Josephson Phase Qubits”, $2,828,591, Rubloff share $1,439,100, 7/1/09-6/30/14, PI C. Lobb (PI), co-PI G. W. Rubloff.

Laboratory for Physical Sciences, National Security Agency, “ALD-AAO Nanotemplated Capacitors for Energy Storage”, $365,843, 10/1/06-12/31/11, PI G. W. Rubloff, co-PI S.B. Lee.

NSF supplement to International Materials Institute (IMI) Program, “IMI for Materials Informatics and Combinatorial Materials Science: an Information Portal for Materials Discovery and Design”, DMR0231291, UMD supplement $139,517, 2/1/08-1/31/09, PI G. W. Rubloff, co-PI I. Takeuchi.

MKS Instruments, “Sensors and Control Systems for Advanced Process Control (APC) in Atomic Layer Deposition (ALD), $170,000, 7/17/06-7/16/08, PI G. W. Rubloff

National Institute of Standards and Technology, “Center for Nanoparticle Risk, Impact, and Assessment”, $1,483,800 10/1/06-9/30/08, PI G. W. Rubloff, co-PI M. Zachariah.

NSF, “The Nearest Uniformity Producing Profile (NUPP): A Generalized optimization Criterion for Thin-Film Processing Applications”, $307,272., 2/1/06-1/31/09, PI R. Adomaitis, co-PI G. W. Rubloff.

NSF REU Site “Introducing the Systems Engineering Paradigm to Young Researchers and Future Leaders, co-PI G. W. Rubloff, $689,000, 2/1/03-5/3/08.

State of Maryland Department of Business and Economic Development, “FabLab Leadership and Outreach Initiative in Nano and Nano-Bio Technology and Manufacturing”, $3,650,000., 12/15/06-12/15/07.

National Institute of Standards and Technology, “Development of Techniques for Measurement of the Elastic, Viscoelastic, and Plastic Properties of Advanced Materials at the Nanoscale”, $330,603, 8/1/05-7/31/08, PI G.W. Rubloff.

NSF, International Materials Institute (IMI) Program, “IMI for Materials Informatics and Combinatorial Materials Science: an Information Portal for Materials Discovery and Design”, DMR0231291, $3,550,000., 2/1/03-1/31/08, UMD part $1,609,575, PI G. W. Rubloff, co-PI I. Takeuchi.

Northrop Grumman, “Atomic Layer Deposition of High-K Dielectrics for CNT Transistors”, PI G. W. Rubloff, $100,000, 1/1/05-12/31/07.

Istituto Trentino di Cultura and Autonomous Province of Trentino, “Exploring New Materials by Combinatorial and Artificial Intelligence Methods”, 348,000 Eu, 10/1/04-9/30/07, PI G. W. Rubloff, co-PI I. Takeuchi.

W. M. Keck Foundation, “Keck Laboratory for Combinatorial Nanosynthesis and Multiscale Characterization”, $750,000, 6/1/04-5/31/07, PI’s G. W. Rubloff, I. Takeuchi, and E. Williams.

MKS Instruments, Vision 1000-C Quadrupole RGA Process Monitor, $50,110., 8/1/06, PI G. W. Rubloff

Laboratory for Physical Sciences, National Security Agency, “Nano-bio Technology”, $280,948., 8/6/04-9/30/06, PI G. W. Rubloff.

National Aeronautics and Space Administration, “UMD-NIST Center for Nanomanufacturing and Metrology”,  $1,600,000 10/1/05-9/30/06, PI M. Zachariah, co-PI G. W. Rubloff.

MKS Instruments, InDuct FTIR Sensor System, $30,000, 1/20/05, PI G. W. Rubloff.

NSF, Information Technology Research (ITR) Program, “Spatially Programmable Equipment: A New Design Paradigm for Semiconductor Manufacturing Enabled by Information Technology”, $499,247., 8/1/02-7/31/05, PI R. Adomaitis, co-PI G. W. Rubloff.

Northrop Grumman, “GaN MOCVD Sensing and Modeling”, PI G. W. Rubloff, $410,308, 10/15/01-12/31/05.

National Institute of Standards and Technology, “Metal CVD Metrology for Cu/low-K Interconnects and Integration”, $175,000, 3/15/02-2/29/04.  PI G.W. Rubloff.

Toshiba Corporation, “Advanced Process Control”, $36,467., 1/1/03-6/30/03, PI G. W. Rubloff.

Laboratory for Physical Sciences, National Security Agency, “Nano-bio Technology”, $80,000., 6/1/03-9/30/03, PI’s G. W. Rubloff and R. Ghodssi.

NSF Materials Research Science and Engineering Center (MRSEC), NSF-DMR-00-80008, U. Maryland, “Deposition and Characterization of Biopolymer Surfaces for BioMEMS”, $68,000, PI G. W. Rubloff.

National Science Foundation/Semiconductor Research Corporation Center for Environmentally Benign Semiconductor Manufacturing, “Integrated ESH Assessment”, $100,000., 4/1/01-3/31/04, PI G. W. Rubloff.

National Science Foundation, “Simulator-Based Learning Systems for Environmentally Benign Semiconductor Manufacturing”, EEC9528813, $399,996, 9/15/99-8/31/03.  PI G. W. Rubloff, co-PI F. Shadman (U. Arizona).

Inficon, donation of CIS Mass Spectrometry Analysis system configured for Tungsten Deposition monitoring, market value $38,000., 2002.

National Science Foundation, “Enhancing Collaborative Research in Industrial Engineering”, $1,300,000, 9/1/98-8/31/02. PI E. H. Park (North Carolina A&T), Co-PI’s B. Ram, H. D. Ratcliff, G. W. Rubloff (Rubloff/UMCP subcontract $390,015.).

Army Research Office, “Acquisition of a Chemical Mechanical Planarizer (CMP) Equipment for Research and Education in Microelectronics and MEMS”, $180,000, 2002, PI R. Ghodssi, co-PI’s G. W. Rubloff and E. Smela.

National Institute of Standards and Technology, “Chemical Sensing for Real-Time Semiconductor Process Metrology”, $204,537, 6/19/00-2/28/02.  PI G.W. Rubloff.

National Science Foundation, “Simulation-based Design and Prototype Testing of a Programmable Chemical Vapor Deposition Reactor”, $84,634, 8/1/00-7/31/02.  PI R. Adomaitis, co-PI G.W. Rubloff.

Inficon, “Chemical Sensing and Metrology in Semiconductor Manufacturing”, $70,000, 9/20/00-9/19/01.  PI G.W. Rubloff.

National Science Foundation, “Integrated Hierarchical Life Cycle Approach to the Design & Operation of a Semiconductor Fabrication Factory”, DMI9713720, $801,000, expected about 10/1/97-9/30/01.  PI M. Fu, co-PI’s S. Marcus, J. Herrmann, and G. W. Rubloff.

Semiconductor Research Corporation, “’Integrated Hierarchical Life Cycle Approach to the Design and Operation of a Semiconductor Fabrication Factory”, $401,333, 10/1/97-9/30/00.  PI M. Fu, co-PI’s S.I. Marcus, J.W. Herrmann, and G.W. Rubloff.

National Institute of Standards and Technology, “Advanced Model-Based Control Techniques”, $138,663, 9/15/00 – 9/14/01.  PI G.W. Rubloff.

National Institute of Standards and Technology, “Advanced Model-Based Control Techniques”, $263,437, 7/1/97-9/30/00.  PI G.W. Rubloff.

National Science Foundation, “Student Support for 2000 Int’l Conference on Characterization and Metrology for ULSI Technology”, NIST June 26-29, 2000, $4,999, 7/1/00–6/30/01.  PI G.W. Rubloff.

National Science Foundation, “Sensor-Integrated Intelligent Control for Rapid Thermal Chemical Vapor Deposition (RTCVD)”, $550,000, 10/1/95 – 9/30/99. PI P. S. Krishnaprasad, Co-PI’s E. Zafiriou, R. Adomaitis, G. W. Rubloff.

National Science Foundation, “Simulator-Based Manufacturing Education and Training for Microelectronics Processing”, EEC9526147, $528,692, 8/15/1996-8/31/00.  PI G.W. Rubloff (originally granted 9/15/95-8/31/00 at $600,148.).

Texas Instruments, SRC Research Customization program, “Sensor-Based Process Control”, $150,000,  10/1/97 – 9/31/00.  PI G. W. Rubloff.

National Institute of Standards and Technology, “Semiconductor Process Metrology through Real-Time Mass Spectrometry”, $180,308, 9/1/97-2/28/00.  PI G. W. Rubloff.

Lam Research, donation of TCP 9100 A2 Alliance cluster tool system to G. W. Rubloff and G. S. Oehrlein, approx. value $1,200,000, Aug., 1998.

Ulvac Corporation, donation of ERA-1000 W CVD cluster tool to G. W. Rubloff, approx. value $1,000,000, Jan. 1997.

National Science Foundation Engineering Research Center, Institute for Systems Research program, $4,237,000, 9/1/94-8/31/98.  PI G. W. Rubloff.

Semiconductor Research Corporation, “Theoretical Foundations and Tools for Concurrent Engineering for Run-to-Run Control in Semiconductor Manufacturing”, approx. $ 102,000, 3/1/97-7/31/98. PI E. Zafiriou, Co-Investigators J. S. Baras and G. W. Rubloff.

National Science Foundation Research Experiences for Undergraduates, Institute for Systems Research program, $102,500, 9/1/94-8/31/98.  PI G. W. Rubloff.

NSF Engineering Research Center for Advanced Electronic Materials Processing, “Diagnostics, Modeling, & Control”, NSF Grant CDR 8721505, Year 8, $104,562, 10/1/95-9/30/96.  PI G. W. Rubloff.

Leybold Inficon, donation of Transpector AGM sensing system, approx. value $25,000, 1994.

Semiconductor Research Corporation, Task 3, “Real-Time Reaction Sensing”, $235,222, Principal Investigator G. W. Rubloff, as part of SRC Contract #95-MP-132, “Single-Wafer Manufacturing for Submicron Technologies”, $400,940, 2/1/94-1/31/96.

Semiconductor Research Corporation, “Real-Time, In-Situ Gaseous Product Sensing and Reaction Modeling of Environmental Aspects of Silane-Based CVD of Si and SiO2”, SRC Contract #94-MJ-563, $121,634, 7/1/94-10/31/95.  PI G. W. Rubloff.

NSF Engineering Research Center for Advanced Electronic Materials Processing, “Diagnostics, Modeling, & Control”, NSF Grant CDR 8721505, Year 7, $113,200, 10/1/94-9/30/95.  PI’s G. W. Rubloff and G. N. Parsons.

NSF Engineering Research Center for Advanced Electronic Materials Processing, “Diagnostics, Modeling, & Control”, NSF Grant CDR 8721505, Year 6, $51,394 ($76,394 including university support), 10/1/93-9/30/94.  PI G. W. Rubloff.

Principal Investigator, Office of Naval Research, 15 years (1975-1987, 1989-1991), with research covering passivation in microelectronics, CVD process science, chemistry of thermal SiO2 and MOS processes, silicide/Si and Schottky barrier interfaces, time-resolved surface reactions, surface chemical bonding/reactions, and new techniques for surface studies.

Principal Investigator, “Growth and Chemistry of Thin Insulators”, DOD Independent Research and Development Program, 1988.