ALD Nanostructures Laboratory (ANSLab)

lab

The Rubloff group established the ANSLab in 2012-2013 as an integrated processing and characterization lab devoted primarily to nanostructures for electrical energy storage research. Batteries (coin cells or recently more flexible configurations) can be assembled in the glove box from current collectors and ALD or other active materials, cycled inside the glove box, and then disassembled for post-cycling surface analysis.‚Äč

Battery Glovebox

Single Glovebox

  • Argon glovebox (H2O, O2 < 1ppm)
  • ALD precursor refill
  • Coin cell battery assembly
  • Electrochemical testing of air sensitive samples through feedthrough to Arbin Potentiostat

Double Glovebox

Integrated System Glovebox

  • Argon glovebox (H2O, O2 < 1ppm)
  • Probe station for electrochemical characterization of solid-state electrolytes and batteries
  • Thermal Evaporator for Li, Na, Mg
  • Loadlock to UHV for XPS, an additional thermal evaporator (Au/Al) and ALD reactor

Li Evap

Thermal Evaporator – Glovebox

  • Glovebox-integrated
  • Evaporation of reversible metal electrodes for characterization of solid-state batteries
  • Li, Na, Mg

load lock

Glovebox Load Lock

  • UHV load lock
  • Base pressure <1E-7 Torr
  • 5 slot wafer cassette
  • Transfer from glovebox to UHV integrated system for ALD deposition, thermal evaporation, ion-milling, and surface analysis

RTTA

UHV Integrated System

  • UHV cluster tool
  • Base pressure <1E-9 Torr
  • Ar ion-milling
  • Coupling of glovebox load lock, thermal evaporator, ALD reactor, and XPS
  • Sample transfer with robotic arm

Thermal Evaporator – Integrated System

  • UHV and atmospheric transfer
  • Base pressure <1E-8
  • Evaporation of blocking metal electrodes for solid-state electrolyte and capacitor testing
  • Au and Al

ALD Reactor – Integrated System

“Mario”

  • Cambridge Nanotech Fiji F200 ALD reactor
  • Base pressure <1E-6 Torr
  • Thermal/plasma ALD with 5 standard precursor ports and 1 bubbler port for low vapor pressure precursors
  • Ar, N2, O2, and NH3 gas
  • In-operando spectroscopic ellipsometry
  • In-operando quadruple mass spectrometry
  • UHV transfer-linked to glovebox, thermal evaporator, and XPS

 

ALD Reactor – Glovebox

“Luigi”

  • Cambridge Nanotech Fiji F200 ALD reactor
  • Base pressure <1E-6 Torr
  • Thermal/plasma ALD reactor with 5 standard precursor ports and 1 bubbler port for low vapor pressure precursors.
  • Ar, N2, O2, O3, and NH3 gas
  • In-operando spectroscopic ellipsometry
  • Atmospheric and glovebox sample loading through load lock

Surface Analysis System

  • Kratos Ultra DLD XPS
  • Base pressure <1E-10
  • Mono-XPS spectroscopy/imaging
  • SEM (200 nm lateral resolution)
  • Auger spectroscopy
  • Ar+ sputtering depth profiling capability
  • UPS, ISS

Spectroscopic Ellipsometer “Luigi”

  • J.A. Woolam M-2000
  • 190-1000 nm
  • Automated base station for measurements in horizontal mode
  • Source and detector mounts to ALD reactor windows for in-operando measurements

Spectroscopic Ellipsometer “Mario”

  • J.A. Woolam M-2000
  • 190-1000 nm
  • Source and detector mounts to ALD reactor windows for in-operando measurements

Biologic Potentiostat

  • 2 channel potentiostat
  • Low current channel
  • Measurements of coin cells and custom-built electrochemical cells
  • Connection to a probe station for non-air sensitive devices

Biologic Potentiostat – Glovebox

  • 4 channel potentiostat
  • Measurements of coin cells and custom-built electrochemical cells
  • Connection to a probe station for non-air sensitive devices
  • Connection to a probe station inside the integrated system glovebox for solid-state battery testing

 

 

 

 

  • Electrochemical testing of ALD NaPON solid-electrolyte between Pt blocking electrodes for EIS analysis
  • Custom built sample stage inside glovebox with a PID temperature controller for high temperature measurements

 

Arbin Battery Tester

  • Electrochemical testing of air sensitive samples inside the single glovebox
  • Electrochemical testing of coin cells outside of the glovebox

The ANSLab is a Partner Lab of the Maryland NanoCenter, making selected instruments in ANSLab available to researcher outside the Rubloff group and its collaborators.