Single Glovebox

• Argon glovebox (H2O, O2 < 1ppm)
• ALD precursor refill
• Coin cell battery assembly
• Electrochemical testing of air sensitive samples through feedthrough to Arbin Potentiostat

Integrated System Glovebox

• Argon glovebox (H2O, O2 < 1ppm)
• Probe station for electrochemical characterization of solid-state electrolytes and batteries
• Thermal Evaporator for Li, Na, Mg
• Loadlock to UHV for XPS, an additional thermal evaporator (Au/Al) and ALD reactor

Thermal Evaporator – Glovebox

• Glovebox-integrated
• Evaporation of reversible metal electrodes for characterization of solid-state batteries
• Li, Na, Mg

Glovebox Load Lock

• UHV load lock
• Base pressure <1E-7 Torr
• 5 slot wafer cassette
• Transfer from glovebox to UHV integrated system for ALD deposition, thermal evaporation, ion-milling, and surface analysis

UHV Integrated System

• UHV cluster tool
• Base pressure <1E-9 Torr
• Ar ion-milling
• Coupling of glovebox load lock, thermal evaporator, ALD reactor, and XPS
• Sample transfer with robotic arm

Thermal Evaporator – Integrated System

• UHV and atmospheric transfer
• Base pressure <1E-8
• Evaporation of blocking metal electrodes for solid-state electrolyte and capacitor testing
• Au and Al

ALD Reactor – Integrated System

“Mario”

• Cambridge Nanotech Fiji F200 ALD reactor
• Base pressure <1E-6 Torr
• Thermal/plasma ALD with 5 standard precursor ports and 1 bubbler port for low vapor pressure precursors
• Ar, N2, O2, and NH3 gas
• In-operando spectroscopic ellipsometry
• In-operando quadruple mass spectrometry
• UHV transfer-linked to glovebox, thermal evaporator, and XPS

ALD Reactor – Glovebox

“Luigi”

• Cambridge Nanotech Fiji F200 ALD reactor
• Base pressure <1E-6 Torr
• Thermal/plasma ALD reactor with 5 standard precursor ports and 1 bubbler port for low vapor pressure precursors.
• Ar, N2, O2, O3, and NH3 gas
• In-operando spectroscopic ellipsometry
• Atmospheric and glovebox sample loading through load lock

Surface Analysis System

• Kratos Ultra DLD XPS
• Base pressure <1E-10
• Mono-XPS spectroscopy/imaging
• SEM (200 nm lateral resolution)
• Auger spectroscopy
• Ar+ sputtering depth profiling capability
• UPS, ISS

Spectroscopic Ellipsometer “Luigi”

• J.A. Woolam M-2000
• 190-1000 nm
• Automated base station for measurements in horizontal mode
• Source and detector mounts to ALD reactor windows for in-operando measurements

Spectroscopic Ellipsometer “Mario”

• J.A. Woolam M-2000
• 190-1000 nm
• Source and detector mounts to ALD reactor windows for in-operando measurements

Biologic Potentiostat

• 2 channel potentiostat
• Low current channel
• Measurements of coin cells and custom-built electrochemical cells
• Connection to a probe station for non-air sensitive devices

Biologic Potentiostat – Glovebox

• 4 channel potentiostat
• Measurements of coin cells and custom-built electrochemical cells
• Connection to a probe station for non-air sensitive devices
• Connection to a probe station inside the integrated system glovebox for solid-state battery testing

• Electrochemical testing of ALD NaPON solid-electrolyte between Pt blocking electrodes for EIS analysis
• Custom built sample stage inside glovebox with a PID temperature controller for high temperature measurements

Arbin Battery Tester

• Electrochemical testing of air sensitive samples inside the single glovebox
• Electrochemical testing of coin cells outside of the glovebox