The final class presentation
of project results is available here
in pdf form. It includes the presentation itself (about 1/2 hr), along
with a few backup slides.
The final report of project
results is available here in
Some software was generated
in this project and is available here.
showerhead modeling: A manual
for this Matlab software is available in pdf form, along with two
downloadable MatLab files FluxSim.m and mainprog.m
. If you have MatLab installed, you should be able to run these files.
requirements: A simple spreadsheet
implements a calculation of the allowable down time as a function of wafer
starts per month, process times, and equipment up time, in order to assess
the impact of equipment reliability.