Dr. Gary W. Rubloff
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Process diagnostics, sensing, metrology, and control
Semiconductor manufacturing processes and equipment
Systems modeling, simulation, and optimization
Engineered learning systems

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All materials at this site are copyrighted 2003 by the University of Maryland
1996-2003, all rights reserved

Fall 1999: Programmable Reactor Design

 

Results

Overview

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Results

 

Return to Teaching

Final presentation
The final class presentation of project results is available here in pdf form. It includes the presentation itself (about 1/2 hr), along with a few backup slides.

Final report
The final report of project results is available here in pdf form.

Software
Some software was generated in this project and is available here.

Programmable showerhead modeling: A manual for this Matlab software is available in pdf form, along with two downloadable MatLab files FluxSim.m and mainprog.m . If you have MatLab installed, you should be able to run these files.

Throughput requirements: A simple spreadsheet implements a calculation of the allowable down time as a function of wafer starts per month, process times, and equipment up time, in order to assess the impact of equipment reliability.