Dr. Gary W. Rubloff
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Semiconductor manufacturing processes and equipment
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All materials at this site are copyrighted 2003 by the University of Maryland
1996-2003, all rights reserved

Fall 1999: Programmable Reactor Design

 

Organization

Overview

Instructions

Organization

Teams

Results

 

Return to Teaching

Team topics
As a systems engineering design project focused on a specific technology domain, the project teams had to cover two sets of issues, one to address the systems engineering process and the other to assess and develop the technology elements.

Systems engineering issues: requirements and requirements modeling; design alternatives; relevant intellectual property; system modeling and design scaling; optimization and tradeoff analysis; project development and life cycle planning; testing and validation; economic consideration and business development strategy.

In addition, it was recognized that the development cycle was by necessity twofold: first, the course itself constituted a systems engineering exercise, and second, that the output of the course project would be a systems engineering development plan which could in principle be carried out in the future. To assess the course development cycle, and to evaluate the course for future improvements, a mission of class evaluation was added.

Materials, processing, and manufacturing technology issues: process applications in semiconductor manufacturing; reactor and/or process design alternatives; equipment and process modeling; sensor systems; sensor integration; operation and control strategies; technology development pathway; prototypes, testing, and evaluation.

Cross-disciplinary organization
The class consisted of 31 students, with 13 enrolled in the materials course ENMA659S and 18 enrolled in either the systems engineering course ENSE623 or its professional masters counterpart ENSE643. The materials students represented several departments and programs, including materials science and engineering, mechanical engineering, electrical engineering, and chemical engineering.

Cross-disciplinary integration in the course was intentionally sought, and achieved through cross-listing, because of the potential pedagogical synergy and because systems engineering practice depends substantially on effective team integration with technology domain expertise. Indeed, this cross-disciplinary integration was considered a major benefit of the course by both systems and materials students at the end of the course.

To implement an effective cross-disciplinary experience, students from both materials and systems were mixed in each project team. And to make the teams workable, five teams were formed, each with responsibility for a materials topic and a systems topic. The team responsibilities are shown in the table below.