Dr. Gary W. Rubloff
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Research Topics
Process diagnostics, sensing, metrology, and control
Semiconductor manufacturing processes and equipment
Systems modeling, simulation, and optimization
Engineered learning systems

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All materials at this site are copyrighted 2003 by the University of Maryland
1996-2003, all rights reserved

Fall 2000: Evolution of Copper Interconnect

 

Results

Overview

Instructions

Organization

Teams

Results

 

Return to Teaching

Final presentation
The final class presentation of project results is available in pdf form: 

Full class presentation

Processes team
Equipment team
Factory team
Cost-of-ownership team
Development team

Final report
The final report of project results is available in pdf form:

Full class report