Research Overview
Biological microsystems and biomaterials |
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| Programmable deposition of chitosan for biofunctionalization | |
| Biomolecular assembly on chitosan | |
| Enzyme assembly and activity in bioMEMS | |
| Bacterial signaling and quorum sensing | |
| BioMEMS devices, process integration, packaging, and control | |
| Real-time and in-situ diagnostics in bioMEMS | |
Nanostructures and energy applications |
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| Nanostructures for energy devices | |
| Characterization of multilayer structures in nanopores | |
| AAO-ALD nanodevices and energy systems | |
Electronic materials and processes |
|
| Atomic layer deposition (ALD) | |
| ALD-based Josephson junctions for quantum computing | |
| Programmable and combinatorial chemical vapor deposition | |
| Semiconductor materials, processing, and characterization | |
Nanomanufacturing |
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| Sensing and advanced process control for widegap semiconductor growth | |
| Real-time chemical process sensing for metrology and advanced process control | |
| Simulation and optimization in dynamic process systems |
