|Semiconductor Research Corporation
(SRC). The SRC is a
consortium of semiconductor chip manufacturers which supports research in semiconductor
technology and manufacturing. Our research in process sensing, simulation, optimization,
and control has been supported by the SRC through its Materials and Bulk Processes
and its Factory Sciences Programs. These SRC activities provide a close link with
industry needs, perspectives, and people.
|SEMATECH. We also maintain close
links to and regular interactions with Sematech, an important consortium of semiconductor
manufacturing companies which plays a key role in the evolution of U.S. semiconductor
equipment, technology, and manufacturing.
|Semiconductor Industry Association
(SIA). Among numerous
other activities, the SIA sponsors the International Technology Roadmap for
Semiconductors (ITRS). The ITRS results from substantial and ongoing collaboration to
understand technology and manufacturing needs for the future of the semiconductor
industry and to chart an R&D pathway for the future. These roadmaps,
which began in 1994, are crucial reference points for our research. Professor
Rubloff has been active in the construction of these roadmaps, currently serving on the
Metrology Technology Working Group (TWG).
|Consortia supporting the semiconductor equipment industry and its suppliers include SEMI/SEMATECH and SEMI.
|Texas Instruments (TI).
Semiconductor Process and Design Center has directly supported our research to develop real-time and
in-situ sensors, process
optimization strategies, and control methodologies for semiconductor manufacturing as
needed to realize advanced process control.
|Others. Our involvement with semiconductor consortia, professional societies, and
former students and postdocs from our group provides numerous opportunities for
discussions and visits with such companies as Intel, Advanced Micro Devices (AMD),
Lucent, National Semiconductor, LSI Logic, and
(now part of Veeco). We have worked with CVC, a supplier of advanced cluster tool
equipment for semiconductor manufacturing, in the area of semiconductor manufacturing
education and training.
Ulvac. In 1996 the Ulvac Corporation donated an ERA-1000 CVD cluster tool to our
group, which is now installed in LAMP. The tool is a multichamber processing system aimed
at selective tungsten CVD processes for semiconductor manufacturing, and it is one of the
few commercial manufacturing tools capable of processing state-of-art 8" Si wafers
which exist in universities.
|Others. Our involvement with semiconductor consortia, professional societies, and former
students and postdocs from our group provides numerous opportunities for discussions and
visits with such companies as Novellus
Systems, Applied Materials, Tokyo
Electron Laboratories (TEL), Lam Research, Varian, and
Inficon. We have a
long-standing and close collaboration with Inficon to pursue advances in process sensing and its application in process development,
optimization, and control. Inficon has supplied our laboratories with leading-edge
instrumentation for gas phase chemical analysis (e.g., mass spectrometry) in semiconductor
|Visual Solutions, Inc.. Visual Solutions is the source for
VisSimTM, a powerful simulation software platform we use for all our dynamic
simulation activities for semiconductor sensing, optimization, and control and for
manufacturing education and training. Visual Solutions is a partner in our project in
semiconductor manufacturing education and training, providing regular feedback and
assistance to our work.
National Institute of Standards and Technology
We are interacting with NIST experts on semiconductor process sensing, characterization,
and metrology methods, primarily mass spectrometry, and working in conjunction with the
National Semiconductor Metrology Program.
Science Foundation (NSF). Much of our research has been supported by
the NSF's Engineering Directorate, especially the Engineering Education
and Centers Division (EEC) and also the Design, Manufacturing, and
Industrial Innovation Division (DMII).
Arizona Engineering Research Center for Enviromentally Benign
Semiconductor Manufacturing. We are working with Professor Fahrang
Shadman's group to develop
dynamic simulators which describe water recycling systems of importance to environmentally
responsible semiconductor manufacturing. These simulators are intended to facilitate the
optimization of design for such systems, collaboration on such problems at a distance, and
education and training for industry and academic personnel.
Carolina A&T University. We are collaborating with groups in NC
A&T's Industrial Engineering Department on manufacturing systems and
human-computer interaction research under an NSF CIRE program, Enhancing
Collaborative Research in Industrial and Systems Engineering.
societies and groups
|Manufacturing Science and Technology
Group (MSTG) of the American Vacuum Society (AVS). Our attention and results are
closely related to the AVS MSTG, a group directed at understanding and advancing the
science and technology issues underpinning semiconductor
manufacturing. Professor Rubloff is the founding Chairman of the
|American Vacuum Society
(AVS) and Materials Research Society (MRS). The AVS and MRS are
important professional homes for our interests and research results, particularly in areas
of semiconductor materials, processes, equipment and diagnostics.
|The Semiconductor Subway is a valuable,
centralized WWW resource for information on the semiconductor industry.
resources as refereed journals include the Journal of Vacuum Science and Technology
(JVST) and the IEEE Transactions on Semiconductor Manufacturing,
publications such as Future Fab, Semiconductor
International, Solid State
Technology, and Micro are especially useful with their reporting of
current industry trends..