Dr. Gary W. Rubloff
Research Topics
Process diagnostics, sensing, metrology, and control
Semiconductor manufacturing processes and equipment
Systems modeling, simulation, and optimization
Engineered learning systems

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1996-2003, all rights reserved


Industry consortia
Semiconductor Research Corporation (SRC). The SRC is a consortium of semiconductor chip manufacturers which supports research in semiconductor technology and manufacturing. Our research in process sensing, simulation, optimization, and control has been supported by the SRC through its Materials and Bulk Processes and its Factory Sciences Programs. These SRC activities provide a close link with industry needs, perspectives, and people.
SEMATECH. We also maintain close links to and regular interactions with Sematech, an important consortium of semiconductor manufacturing companies which plays a key role in the evolution of U.S. semiconductor equipment, technology, and manufacturing.
Semiconductor Industry Association (SIA). Among numerous other activities, the SIA sponsors the International Technology Roadmap for Semiconductors (ITRS). The ITRS results from substantial and ongoing collaboration to understand technology and manufacturing needs for the future of the semiconductor (VLSI) industry and to chart an R&D pathway for the future. These roadmaps, which began in 1994, are crucial reference points for our research. Professor Rubloff has been active in the construction of these roadmaps, currently serving on the Metrology Technology Working Group (TWG).
Consortia supporting the semiconductor equipment industry and its suppliers include SEMI/SEMATECH and SEMI.
Semiconductor chip manufacturers
Texas Instruments (TI).  TI's Semiconductor Process and Design Center has directly supported our research to develop real-time and in-situ sensors, process optimization strategies, and control methodologies for semiconductor manufacturing as needed to realize advanced process control.
Others. Our involvement with semiconductor consortia, professional societies, and former students and postdocs from our group provides numerous opportunities for discussions and visits with such companies as Intel, Advanced Micro Devices (AMD), Motorola, IBM, Lucent, National Semiconductor, LSI Logic, and Micron.
Semiconductor equipment suppliers

CVC Products (now part of Veeco). We have worked with CVC, a supplier of advanced cluster tool equipment for semiconductor manufacturing, in the area of semiconductor manufacturing education and training. 

Ulvac. In 1996 the Ulvac Corporation donated an ERA-1000 CVD cluster tool to our group, which is now installed in LAMP. The tool is a multichamber processing system aimed at selective tungsten CVD processes for semiconductor manufacturing, and it is one of the few commercial manufacturing tools capable of processing state-of-art 8" Si wafers which exist in universities.

Others. Our involvement with semiconductor consortia, professional societies, and former students and postdocs from our group provides numerous opportunities for discussions and visits with such companies as Novellus Systems, Applied Materials, Tokyo Electron Laboratories (TEL), Lam Research, Varian, and Watkins-Johnson.
Component suppliers

Inficon. We have a long-standing and close collaboration with Inficon to pursue advances in process sensing and its application in process development, optimization, and control. Inficon has supplied our laboratories with leading-edge instrumentation for gas phase chemical analysis (e.g., mass spectrometry) in semiconductor processes.

Software suppliers
Visual Solutions, Inc.. Visual Solutions is the source for VisSimTM, a powerful simulation software platform we use for all our dynamic simulation activities for semiconductor sensing, optimization, and control and for manufacturing education and training. Visual Solutions is a partner in our project in semiconductor manufacturing education and training, providing regular feedback and assistance to our work.

National Institute of Standards and Technology (NIST). We are interacting with NIST experts on semiconductor process sensing, characterization, and metrology methods, primarily mass spectrometry, and working in conjunction with the National Semiconductor Metrology Program.

National Science Foundation (NSF). Much of our research has been supported by the NSF's Engineering Directorate, especially the Engineering Education and Centers Division (EEC) and also the Design, Manufacturing, and Industrial Innovation Division (DMII).
U. Arizona Engineering Research Center for Enviromentally Benign Semiconductor Manufacturing. We are working with Professor Fahrang Shadman's group to develop dynamic simulators which describe water recycling systems of importance to environmentally responsible semiconductor manufacturing. These simulators are intended to facilitate the optimization of design for such systems, collaboration on such problems at a distance, and education and training for industry and academic personnel.
North Carolina A&T University.  We are collaborating with groups in NC A&T's Industrial Engineering Department on manufacturing systems and human-computer interaction research under an NSF CIRE program, Enhancing Collaborative Research in Industrial and Systems Engineering.
Professional societies and groups
Manufacturing Science and Technology Group (MSTG) of the American Vacuum Society (AVS). Our attention and results are closely related to the AVS MSTG, a group directed at understanding and advancing the science and technology issues underpinning semiconductor manufacturing.  Professor Rubloff is the founding Chairman of the MSTG.
American Vacuum Society (AVS) and Materials Research Society (MRS). The AVS and MRS are important professional homes for our interests and research results, particularly in areas of semiconductor materials, processes, equipment and diagnostics.
The Semiconductor Subway is a valuable, centralized WWW resource for information on the semiconductor industry.  
Primary resources as refereed journals include the Journal of Vacuum Science and Technology (JVST) and the IEEE Transactions on Semiconductor Manufacturing,
Trade publications such as Future Fab, Semiconductor InternationalSolid State Technology, and Micro are especially useful with their reporting of current industry trends..